We have several research projects including quantum computing and
millimeter and submillimeter wave mixers using the Josephson effect in
superconductors. In support of these projects we have built up a
fabrication lab for making multilevel superconducting circuits.
Patterning is done using EBL and DUV contact lithography. Devices with
dimensions of several nanometers can be patterned. In addition we have a
collection of thin film processing system such as RIE, sputtering, CMP,
plasma ashing, profilers, ellipsometer, etc.